HAFNIUM (IV) CHLORIDE, CAS No. 13499-05-3

Welcome to iChemical.com!

In the below part, please select the country you want us to ship to: Please note that once you've selected a shipping country, all pricing information on our website will be automatically updated to include door-to-door shipping to the country you specified.

North America

South America

Africa

Europe

Asia

Oceania

13499-05-3

Catalog No. EBD217981

CAS 13499-05-3

Name HAFNIUM (IV) CHLORIDE

Get Quote

Basic Information

Synonyms: HAFNIUM(IV)CHLORIDE hafniumchloride hafniumtetrachloride (beta-4)-hafniumchloride(hfcl4 hafniumchloride(hfcl4),(t-4)- hfcl4 hafniumchloride,sublimed,99.9% hafnium(iv)chlorideanhydrous98+%(1-3%zr)

Molecular Formula: Cl4Hf

Molecular Weight: 320.3

MDL Number: MFCD00011034

Categories: Materials Chemistry > Inorganic and Functional Nanomaterials > Metal Oxide Precursors Synthetic Chemistry > Basic Synthetic Reagents > Inorganic Compounds and Metal Salts

Product Description:

Hafnium chloride (HfCl4), CAS 13499-05-3, is an inorganic compound that exists as a white to off-white crystalline solid. It is highly hygroscopic and reacts vigorously with water, releasing hydrogen chloride (HCl) gas. It is typically handled under inert atmospheres such as argon or nitrogen to prevent hydrolysis. The primary industrial application of hafnium chloride is as a crucial precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. It is extensively used for depositing high-k dielectric hafnium oxide (HfO2) thin films in advanced semiconductor devices, serving as a gate dielectric material to replace silicon dioxide. It is also a key starting material for synthesizing other hafnium-containing compounds, organometallic complexes, and catalysts. Due to its moisture sensitivity and corrosiveness, it requires careful handling. It finds additional uses in the production of specialty ceramics, optical coatings, and as a catalyst in specific organic synthesis reactions, such as Friedel-Crafts acylations.

Physical Properties

Melting Point: 319 °C

Safety Information

Packing Level: II

Hazard Category: 8

Transport Codes: 3260

Analytical Data

Appearance: white crystalline solid